Properties of corona charged plasma vapour deposited PTFE fdm
نویسندگان
چکیده
Properties characterising charge storage in submicron polytetrafluoroethylene (PTFE) layer deposited by evaporation in a radio-frequency (RF) plasma are described in thls paper. X-ray difFraction (XRD) and scanning electron microscopy (SEM) investigations have shown that the method allows to deposit amorphous and uniform dielectric layers exhibiting resistivity at room temperature in the order of lOI4 Rm. Electrical conductivity and thermostimulated discharge current (TSD) results were measured in the temperature range 300-450K while an isothermal discharge characteristic was examined at room temperature.
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